PRISM COUPLER REFERENCES
Theory of thin film waveguides:
P. K. Tien, R. Ulrich, and R. J. Martin, "Modes of
Propagating Light Waves in Thin Deposited Semiconductor
Films", Appl. Phys. Lett., 14, 291 (1969).
P. K. Tien, "Light Waves in Thin Films and Integrated
Optics", Appl. Opt., 10, 2395 (1971).
R. Ulrich and R. Torge, "Measurement of Thin Film
Parameters with a Prism Coupler", Appl. Opt., 12, 2901
(1973).
Prism couplers as thin film measuring instruments:
A. C. Adams, D. P. Schinke, and C. D. Capio, "An
Evaluation of the Prism Coupler for Measuring the Thickness
and Refractive Index of Dielectric Films on Silicon
Substrates", J. Electrochem. Soc., 126, 1539 (1979).
R. T. Kersten, "A New Method for Measuring Refractive
Index and Thickness of Liquid and Deposited Solid Thin
Films", Opt. Commun., 13, 327 (1975).
Specific applications of prism couplers:
A. C. Adams and S. P. Murarka, "Measuring the Phosphorus
Concentration in Deposited Phosphosilicate Films", J.
Electrochem. Soc., 126, 334 (1979).
H. J. Lee, C. H. Henry, K. J. Orlowsky, R. F. Kazarinov, and
T. Y. Kometani, "Refractive Index Dispersion of
Phosphosilicate Glass, Thermal Oxide, and Silicon Nitride
Films on Silicon", Appl. Opt., 27, 4104 (1988).
F. C. Pieris, S. Lee, U. Bindley, and J. K. Furdyna, "A
Prism Coupling Technique for Characterizing Thin Film II-VI
Semiconductor Systems," J. Appl. Phys., 84, 9 (1998).
T. Sharda, T. Soga, T. Jimbo, "Optical Properties of Nanocrystalline Diamond Films by Prism Coupling" J. Appl. Phys. V. 93, 101 (2003).
J. E. Tong, K. Schertenleib, and R. A. Carpio, "Process and Film Characterization of PECVD Borophosphosilicate Films for VLSI Applications," Solid State Tech., 27, 161 (January 1984).
M. J. Sun, "Refractive Index Dispersion of Garnet Films
Derived from Accurate Measurement of Film Thickness,"
Appl. Phys. Lett, 33, 291 (1978).
S. S. Hardaker, S. Moghazy, C. Y. Cha, and R. J. Samuels,
"Quantitative Characterization of Optical Anisotropy in
High Refractive Index Films," J. Polymer Sci., 31, 1951
(1993).
S. J. Bai, R. J. Spry, D. E. Zelmon, U Ramabadran, and J.
Jackson, "Optical Anisotropy of Polymeric Films Measured
by Waveguide Propagation Mode Determination," J. Polymer
Sci., 30, 1507 (1992).
C. G. Zimba, V. M. Hallmark, S. Turrell, J. D. Swalen, and J.
F. Rabolt, "Applications of Fourier Transform Raman
Spectroscopy to Studies of Thin Polymer Films", J. Phys.
Chem., 94, 939 (1990).
S. Heminghaus, D. Boese, D. Y. Yoon, and B. A. Smith,
"Large Anisotropy in Optical Properties of Thin
Polyimide Films of Poly(p-phenylene
biphenyltetracarboximide", Appl. Phys. Lett. 59, 1043
(1991).
D. Boese, H. Lee, D. Y. Yoon, J. D. Swalen, and J. F. Rabolt,
"Chain Orientation and Anisotropies in Optical and
Dielectric Properties in Thin Films of Stiff
Polyimides," J. Polymer Sci., 30, 1321 (1992).
M. Ree, K. Kim, S. H. Woo, and H. Chang, "Structure,
Chain Orientation, and Properties in Thin Films of Aromatic
Polyimides with Various Chain Rigidities," J. Appl.
Phys., 81, 2 (1997).
S. C. Noe, J. Y. Pan, and S. D. Senturia, "Optical
Waveguiding as a Method of Characterizing the Effect of
Extended Cure and Moisture on Polyimide Films", SPE
ANTEC 1991, Paper #376/33.
H. Fruitwalla, P. P. Shirodkar, P. J. Nelson, and S. D.
Schregenberger, "Characterization of Blown Film
Morphology", SPE ANTEC 1994.
D. M. Gualtieri and R. C. Morris, "Epitaxial Waveguides
of Aluminum Garnet," J. Appl. Phys., 74, 1 (1993).
G. E. Peterson and S. R. Lunt, "Refractive Index
Measurements of Lithium Niobate Integrated Optical Substrates
by Total Internal Reflection", Ferroelectrics, 75, 99
(1987).
S. S. Sarkisov, E. K. Williams, D. Ila, P. Venkateswarlu, and
D. B. Poker, "Vanishing Optical Isolation Barrier in
Double Implanted Lithium Niobate Waveguide," Appl. Phys.
Lett., 68, 2329 (1996).
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